GaAs、InP are gases wildly used in Optoelectronics/Compound semiconductors so as Solar cells etc. UK APNC has more than 35 years of experience for building and service of GaAs/InP Wet Scrubber; thorough and fully understand the scrubber design principle.

产品详情

APNC co-work with international factories such as IQE and well-know MO manufacturer for many years. Base on IEM , APNC keep the advantages of scrubber and continuously improve it to supply stable and reliable Scrubber.

APNC EX4 uses the character of the gases, dissolve them by Chemical Method and meet the safe emission standard.

APNC Scrubber remains the 1st choice for worldwide customers for its high processing ability, reliability and stability so as its’ low consumption and low maintenance.

Features

• High Automation

• High Capacity

• High reliability and safety

• Operator-friendly and easy for maintenance

• Self-monitoring function & Multi-point sensor monitoring & alarming

• 5/8 inlet configuration for saving space and running cost

Specification

• Scrubber Gases: GaAs and InP exhaust gases from MOCVD

• Venturi: 4 (optional for 5, 8)

• Maximum capability: 10L/min of PH3 and 2L/min of AsH3 or 8L/min of PH3 and 4L/min of AsH3

• Maximum total gas flow: 1000L/min

• System Size：2.3m（L）×1.28m（D）×2.4m（H）

Copy product links

Long by picture save/share

INQUIRY

在线询盘 MORE+

联系人 *
手机 *
描述
Submit

Security Code

Refresh the code

Cancel

Confirm

Inquiry Content：

You have no items to require

Add Successfully

Continue To Visit Inquiry Now