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LED&Semiconductor Industry
Ecosys C91
C91 is an advanced integrated thermal-wet abatement system and is designed to provide a controlled gas treatment environment for today’s demanding semiconductor, LED and flat panel display process chemistry.
C91 uses multiple heating rods with a fault-tolerant system to reduce system downtime. Heaters are evenly spaced in the reaction chamber to ensure that process gas is well decomposed.
Applications：
Polysilicon
CVD
Pyrophoric/flammable gas combustion
Gas cabinet vent purge
Advantages：
Fault-tolerance heater design
Sedimentation compartment
Particles separation system
Limited NOx and CO emission
Low water consumption and recirculating water system
Ease of use and maintenance
Optional accessories available
Third party certified, SEMI S2 compliance, CE marked
Ethernet ready
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Hong Kong Headquarters
Address: 13A Weswick Commercial Building, No.147 Queen's Road East, Wanchai, Hong Kong
Telephone:+852 28662978
Fax:+852 28662013
Email:admin@bb-technology.com.hk
Xiamen Office
Telephone:+86 (592) 5083007/5083006
Taiwan Office
Telephone:+886-2-77253668
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