ADT 977 Wafer Clean Systems
ADT 977 Wafer Cleaner System is designed for cleaning work pieces after dicing.The systems are offered in three basic configurations :
WCS-977 – round wafer up to 8"
WCS-977LA – round wafer up to 12"
WCS-977D – a standalone coating/de-coating station with:
*Wafer spin coating technology
*Absolute surface protection during dicing
*100% removal of contamination and residue
*Atomized cleaning and N2 drying
. Compact design
. Atomizing or High pressure cleaning
. Easy to use - one touch activatio