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Wet Scrubber for ICP/PECVD
This range of scrubbers are designed for treating exhaust gases from ICP/PECVD systems， with state of art design，they are coming with high removal efficiency and easy operation as well as low running cost and maintenance，making them the most competitive in the market。The standard model has four inlets with total gas flow capacity at 600lpm。Customer-made models are availabe on request.
Specifications:
Air inlets: 4 venturis (other specs are available)
Air source: 1) PECVD burner 2) ICP
Total air flow rate: 600 L/min (36 m3/hr) (other specs are available)
Targeted air pollutants: Water soluble acidic gases (NOx, F2, Cl2, SiCl4, HCl)
Overall footprint for the scrubber: ~ L1.0m x W1.0m x H1.8m
Estd. Weight: Dry – 150kg; Operating – 200kg
Features：
• Water make-up through solenoid valve is controlled by pH value automatically
• Recirculation pump pressure is monitored and protected by pressure switch
• Scrubber internal accessible through access ports for viewing and cleaning
• Spray nozzles are accessible for cleaning and replacement
• Polypropylene body
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Hong Kong Headquarters
Address: 13A Weswick Commercial Building, No.147 Queen's Road East, Wanchai, Hong Kong
Telephone:+852 28662978
Fax:+852 28662013
Email:admin@bb-technology.com.hk
Xiamen Office
Telephone:+86 (592) 5083007/5083006
Taiwan Office
Telephone:+886-2-77253668
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